Inventor
LANE BARTON G
US7 patents
⚠️ This page may combine multiple inventors who share the name “LANE BARTON G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS10002744B2Jun 19, 2018
System and method for controlling plasma density
TOKYO ELECTRON LTD5 citations72
US10354841B2Jul 16, 2019
Plasma generation and control using a DC ring
TOKYO ELECTRON LTD1 citations62
US11551909B2Jan 10, 2023
Ultra-localized and plasma uniformity control in a plasma processing system
TOKYO ELECTRON LTD1 citations61
US11037798B2Jun 15, 2021
Self-limiting cyclic etch method for carbon-based films
TOKYO ELECTRON LTD0 citations46
US10459334B2Oct 29, 2019
Facilitation of orthotopic patterns during substrate fabrication
TOKYO ELECTRON LTD0 citations39