Inventor
NUMATA MITSUNORI
JP7 patents
Patents
7 patentsUS9594240B2Mar 14, 2017
Lighting apparatus, and optical inspection apparatus and optical microscope using the lighting apparatus
SAMSUNG ELECTRONICS CO LTD3 citations71
US12228499B2Feb 18, 2025
Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method
SAMSUNG ELECTRONICS CO LTD0 citations60
US11604136B2Mar 14, 2023
Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method
SAMSUNG ELECTRONICS CO LTD0 citations60
US10429315B2Oct 1, 2019
Imaging apparatus and imaging method
SAMSUNG ELECTRONICS CO LTD1 citations59
US11761906B2Sep 19, 2023
Optical device
SAMSUNG ELECTRONICS CO LTD0 citations50
US9453800B2Sep 27, 2016
Apparatus and method of inspecting a defect of an object
SAMSUNG ELECTRONICS CO LTD1 citations50
US12439607B2Oct 7, 2025
Inspection device
SAMSUNG ELECTRONICS CO LTD0 citations48