Inventor
SASAGAWA HIRONARI
JP8 patents
Patents
8 patentsUS11450537B2Sep 20, 2022
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD2 citations72
US11961746B2Apr 16, 2024
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US11728166B2Aug 15, 2023
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US11810791B2Nov 7, 2023
Etching method, substrate processing apparatus, and substrate processing system
TOKYO ELECTRON LTD1 citations60
US12112954B2Oct 8, 2024
Etching method, substrate processing apparatus, and substrate processing system
TOKYO ELECTRON LTD1 citations59
US11380555B2Jul 5, 2022
Etching method and etching apparatus
TOKYO ELECTRON LTD0 citations51
US10916420B2Feb 9, 2021
Processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations51
US11862441B2Jan 2, 2024
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations49