Inventor
LAI TSUNG-LUNG
TW8 patents
Patents
8 patentsUS11020837B2Jun 1, 2021
Monolithic platen
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12311498B2May 27, 2025
Monolithic platen
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11919126B2Mar 5, 2024
Monolithic platen
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11850702B2Dec 26, 2023
Chemical mechanical planarization membrane
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11267099B2Mar 8, 2022
Chemical mechanical planarization membrane
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11975421B2May 7, 2024
Single bodied platen housing a detection module for CMP systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11571782B2Feb 7, 2023
Single bodied platen housing a detection module for CMP systems
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations58
US12237179B2Feb 25, 2025
Fittings for wafer cleaning systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57