Inventor
PENG SHENG-TAI
TW14 patents
Patents
14 patentsUS11020837B2Jun 1, 2021
Monolithic platen
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10661408B2May 26, 2020
Platen stopper
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations67
US12427622B2Sep 30, 2025
Polishing pad conditioning apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11618126B2Apr 4, 2023
Polishing pad conditioning apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12311498B2May 27, 2025
Monolithic platen
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11919126B2Mar 5, 2024
Monolithic platen
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11850702B2Dec 26, 2023
Chemical mechanical planarization membrane
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11267099B2Mar 8, 2022
Chemical mechanical planarization membrane
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11975421B2May 7, 2024
Single bodied platen housing a detection module for CMP systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11571782B2Feb 7, 2023
Single bodied platen housing a detection module for CMP systems
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations58
US12525421B2Jan 13, 2026
Ion source head and ion source head curved liner, deflector, or repeller
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US12412725B2Sep 9, 2025
Adjustable support for arc chamber of ion source
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US12002647B2Jun 4, 2024
Adjustable support for arc chamber of ion source
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US12138735B2Nov 12, 2024
Multi-layered windows for use in chemical-mechanical planarization systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46