Inventor
DHANAKSHIRUR AKSHAY
IN7 patents
Patents
7 patentsUS12460298B2Nov 4, 2025
Showerhead design to control stray deposition
APPLIED MATERIALS INC0 citations59
US11959174B2Apr 16, 2024
Shunt door for magnets in plasma process chamber
APPLIED MATERIALS INC1 citations59
US12338530B2Jun 24, 2025
Shaped showerhead for edge plasma modulation
APPLIED MATERIALS INC0 citations58
US11929278B2Mar 12, 2024
Low impedance current path for edge non-uniformity tuning
APPLIED MATERIALS INC0 citations58
US11869795B2Jan 9, 2024
Mesa height modulation for thickness correction
APPLIED MATERIALS INC0 citations58
US12562355B2Feb 24, 2026
Isolator for processing chambers
APPLIED MATERIALS INC0 citations56
US11984302B2May 14, 2024
Magnetic-material shield around plasma chambers near pedestal
APPLIED MATERIALS INC0 citations47