Inventor
ZOPE BHUSHAN N
US11 patents
⚠️ This page may combine multiple inventors who share the name “ZOPE BHUSHAN N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS9685371B2Jun 20, 2017
Method of enabling seamless cobalt gap-fill
APPLIED MATERIALS INC35 citations94
US9528183B2Dec 27, 2016
Cobalt removal for chamber clean or pre-clean process
APPLIED MATERIALS INC25 citations93
US9842769B2Dec 12, 2017
Method of enabling seamless cobalt gap-fill
APPLIED MATERIALS INC3 citations73
US10199230B2Feb 5, 2019
Methods for selective deposition of metal silicides via atomic layer deposition cycles
APPLIED MATERIALS INC3 citations72
US9378941B2Jun 28, 2016
Interface treatment of semiconductor surfaces with high density low energy plasma
APPLIED MATERIALS INC3 citations72
US10699946B2Jun 30, 2020
Method of enabling seamless cobalt gap-fill
APPLIED MATERIALS INC0 citations52
US10269633B2Apr 23, 2019
Method of enabling seamless cobalt gap-fill
APPLIED MATERIALS INC0 citations52
US10163656B2Dec 25, 2018
Methods for dry etching cobalt metal using fluorine radicals
APPLIED MATERIALS INC1 citations51
US9218980B2Dec 22, 2015
Surface treatment to improve CCTBA based CVD co nucleation on dielectric substrate
APPLIED MATERIALS INC1 citations51
US9637819B2May 2, 2017
Methods for preferential growth of cobalt within substrate features
APPLIED MATERIALS INC0 citations41