Inventor
ABRAHAM MATHEW
US12 patents
⚠️ This page may combine multiple inventors who share the name “ABRAHAM MATHEW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS9685371B2Jun 20, 2017
Method of enabling seamless cobalt gap-fill
APPLIED MATERIALS INC35 citations94
US9570307B2Feb 14, 2017
Methods of doping substrates with ALD
APPLIED MATERIALS INC5 citations82
US9218973B2Dec 22, 2015
Methods of doping substrates with ALD
APPLIED MATERIALS INC5 citations82
US9842769B2Dec 12, 2017
Method of enabling seamless cobalt gap-fill
APPLIED MATERIALS INC3 citations73
US9378941B2Jun 28, 2016
Interface treatment of semiconductor surfaces with high density low energy plasma
APPLIED MATERIALS INC3 citations72
US10699946B2Jun 30, 2020
Method of enabling seamless cobalt gap-fill
APPLIED MATERIALS INC0 citations52
US10269633B2Apr 23, 2019
Method of enabling seamless cobalt gap-fill
APPLIED MATERIALS INC0 citations52
US9543172B2Jan 10, 2017
Apparatus for providing and directing heat energy in a process chamber
APPLIED MATERIALS INC0 citations51