Inventor
JEON SUNG YOUN
KR3 patents
Patents
3 patentsUS12207362B2Jan 21, 2025
Support unit, substrate treating apparatus including the same and temperature control method
SEMES CO LTD3 citations72
US11543838B2Jan 3, 2023
Air pressure control device
SEMES CO LTD0 citations60
US12313392B2May 27, 2025
Apparatus and method for measuring the gap
SEMES CO LTD0 citations50