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Inventor
KUEYEL BIROL
3 patents
⚠️ This page may combine multiple inventors who share the name “KUEYEL BIROL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
WESTERN ELECTRIC CO
2 patents
US4282267A
Aug 4, 1981
Methods and apparatus for generating plasmas
WESTERN ELECTRIC CO
205 citations
94
US4333814A
Jun 8, 1982
Methods and apparatus for improving an RF excited reactive gas plasma
WESTERN ELECTRIC CO
44 citations
88
AT & T TECHNOLOGIES INC
1 patent
US4499162A
Feb 12, 1985
Photomask and method of using same
AT & T TECHNOLOGIES INC
15 citations
70