Inventor
TOMURA MAJU
JP53 patents
Patents
50 patentsUS9922806B2Mar 20, 2018
Etching method and plasma processing apparatus
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Selective plasma etching method of a first region containing a silicon atom and an oxygen atom
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Method and apparatus for formation of protective sidewall layer for bow reduction
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Etching method and etching apparatus
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Showing the top 50 of 53 patents by PatentIndex Score.