Inventor
TAKEDA Ryohei
JP8 patents
Patents
8 patentsUS9922806B2Mar 20, 2018
Etching method and plasma processing apparatus
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Etching method
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Etching method
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US9659789B2May 23, 2017
Etching method and etching apparatus
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US12051570B2Jul 30, 2024
Plasma processing apparatus
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US12548744B2Feb 10, 2026
Plasma processing apparatus, control method, and storage medium for suppressing deterioration effects from wear of an edge ring
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US12562352B2Feb 24, 2026
Prediction method and information processing apparatus for predicting the process result in a plasma etching process
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US9570312B2Feb 14, 2017
Plasma etching method
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