Inventor
TAKASHIMA RYUICHI
JP5 patents
Patents
5 patentsUS9922806B2Mar 20, 2018
Etching method and plasma processing apparatus
TOKYO ELECTRON LTD44 citations96
US10410877B2Sep 10, 2019
Etching method
TOKYO ELECTRON LTD40 citations92
US9659789B2May 23, 2017
Etching method and etching apparatus
TOKYO ELECTRON LTD11 citations82
US12051570B2Jul 30, 2024
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations61
US8906808B2Dec 9, 2014
Etching method
TOKYO ELECTRON LTD0 citations50