Inventor
OOYA YOSHINOBU
JP14 patents
⚠️ This page may combine multiple inventors who share the name “OOYA YOSHINOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS8383001B2Feb 26, 2013
Plasma etching method, plasma etching apparatus and storage medium
TOKYO ELECTRON LTD60 citations97
US9922806B2Mar 20, 2018
Etching method and plasma processing apparatus
TOKYO ELECTRON LTD44 citations96
US10410877B2Sep 10, 2019
Etching method
TOKYO ELECTRON LTD40 citations92
US10381237B2Aug 13, 2019
Etching method
TOKYO ELECTRON LTD39 citations92
US9997374B2Jun 12, 2018
Etching method
TOKYO ELECTRON LTD38 citations92
US9659789B2May 23, 2017
Etching method and etching apparatus
TOKYO ELECTRON LTD11 citations82
US12051570B2Jul 30, 2024
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations61
US8906808B2Dec 9, 2014
Etching method
TOKYO ELECTRON LTD0 citations50
US9478387B2Oct 25, 2016
Plasma processing apparatus
TOKYO ELECTRON LTD1 citations48
US9812996B2Nov 7, 2017
Method for calculating distance, method for neutralizing electrostatic chuck, and processing apparatus
TOKYO ELECTRON LTD0 citations41