Inventor

LEE WILLIAM DAVIS

US32 patents

⚠️ This page may combine multiple inventors who share the name “LEE WILLIAM DAVIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEE WILLIAM DAVIS

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Apparatus and method for contamination control in ion beam apparatus

Parallelizing electrostatic acceleration/deceleration optical element

Liquid immersion doping

Apparatus and method for in-situ cleaning in ion beam apparatus

Controlling contamination particle trajectory from a beam-line electrostatic element

Light bath for particle suppression

Multi-aperture extraction system for angled ion beam

Selective processing of a workpiece

In-situ plasma cleaning of process chamber components

Dual material repeller

In-situ plasma cleaning of process chamber components

In-situ plasma cleaning of process chamber components

Platen with multiple shaped grounding structures

Ion implant assisted metal etching

Apparatus and method for multilayer deposition

Platen assembly

Selective processing of a workpiece using ion beam implantation and workpiece rotation

AXCELIS TECH INC

Constant mass flow multi-level coolant path electrostatic chuck

Charge integration based electrostatic clamp health monitor

Silaborane implantation processes

Variable electrode pattern for versatile electrostatic clamp operation

Workpiece carrier

VARIAN SEMICONDUCTOR EQUIPMENT

Apparatus for dynamic temperature control of an ion source

Gas coupled arc chamber cooling

Bias electrodes for tandem accelerator

APPLIED MATERIALS INC

System, apparatus and method for variable length electrode in linear accelerator

Drift tube, apparatus and ion implanter having variable focus electrode in linear accelerator

RF quadrupole particle accelerator

JUSTESEN PERRY J I

Heated electrostatic chuck including mechanical clamp capability at high temperature

ADVANCED MAGNETIC PROCESSES INC

Magneto-plasma separator and method for separation

LEE WILLIAM DAVIS

Heated annulus chuck

OTA KAN

Effective algorithm for warming a twist axis for cold ion implantations