Inventor

PEREL ALEXANDER S

US28 patents

⚠️ This page may combine multiple inventors who share the name “PEREL ALEXANDER S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PEREL ALEXANDER S

AXCELIS TECH INC

Decaborane ionizer

Method and system for icosaborane implantation

In-situ monitoring on an ion implanter

Decaborane ion source

In-situ cleaning of beam defining apertures in an ion implanter

Ion beam angle measurement systems and methods for ion implantation systems

Methods and systems for trapping ion beam particles and focusing an ion beam

Ion beam monitoring in an ion implanter using an imaging device

Bellows liner for an ion beam implanter

VARIAN SEMICONDUCTOR EQUIPMENT

Technique for improving the performance and extending the lifetime of an ion source with gas dilution

Ion source and a method for in-situ cleaning thereof

Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms

Ion source cleaning end point detection

Method and apparatus for controlling beam current uniformity in an ion implanter

Techniques for optical ion beam metrology

Ethane implantation with a dilution gas

APPLIED MATERIALS INC

Ion source with multiple configurations

Shaped repeller for an indirectly heated cathode ion source

Variable thickness ion source extraction plate

Cylindrical shaped arc chamber for indirectly heated cathode ion source

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Ion source for enhanced ionization

Dual material repeller

CHANEY CRAIG R

Cleaning of an extraction aperture of an ion source

Cleaning of an extraction aperture of an ion source

LOW RUSSELL J

Flexible ion source

KOO BON-WOONG

Ion source and a method for in-situ cleaning thereof

KOO JOHN BON-WOONG

Directional gas injection for an ion source cathode assembly

PEREL ALEXANDER S

Technique for ion implanting a target