Inventor
TOMITA MUNENORI
JP5 patents
Patents
5 patentsUS4915775AApr 10, 1990
Apparatus for adjusting initial position of melt surface
SHINETSU HANDOTAI KK24 citations91
US5354516AOct 11, 1994
Gas feeder
SHINETSU HANDOTAI KK30 citations89
US5188501AFeb 23, 1993
Wafer transfer system
SHINETSU HANDOTAI KK48 citations87
US5993557ANov 30, 1999
Apparatus for growing single-crystalline semiconductor film
SHINETSU HANDOTAI KK10 citations72
US5849078ADec 15, 1998
Method for growing single-crystalline semiconductor film and apparatus used therefor
SHINETSU HANDOTAI KK4 citations61