Inventor
IRIKI NOBUYUKI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “IRIKI NOBUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
4 patentsUS5497331AMar 5, 1996
Semiconductor integrated circuit device fabrication method and its fabrication apparatus
HITACHI LTD46 citations92
US5094539AMar 10, 1992
Method of making semiconductor integrated circuit, pattern detecting method, and system for semiconductor alignment and reduced stepping exposure for use in same
HITACHI LTD22 citations90
US5432608AJul 11, 1995
Method of making semiconductor integrated circuit, pattern detecting method, and system for semiconductor alignment and reduced stepping exposure for use in same
HITACHI LTD11 citations71
US5260771ANov 9, 1993
Method of making semiconductor integrated circuit, pattern detecting method, and system for semiconductor alignment and reduced stepping exposure for use in same
HITACHI LTD8 citations71