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Inventor

HEARNE JOHN S

US6 patents
⚠️ This page may combine multiple inventors who share the name “HEARNE JOHN S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents
US5884640AMar 23, 1999

Method and apparatus for drying substrates

APPLIED MATERIALS INC535 citations98
US6348124B1Feb 19, 2002

Delivery of polishing agents in a wafer processing system

APPLIED MATERIALS INC89 citations96
US6027574AFeb 22, 2000

Method of drying a substrate by lowering a fluid surface level

APPLIED MATERIALS INC43 citations96

ONTRAK SYSTEMS INC

3 patents
US5566466AOct 22, 1996

Spindle assembly with improved wafer holder

ONTRAK SYSTEMS INC77 citations94
US5745946AMay 5, 1998

Substrate processing system

ONTRAK SYSTEMS INC68 citations92
US5727332AMar 17, 1998

Contamination control in substrate processing system

ONTRAK SYSTEMS INC44 citations91