Inventor
RICK ALFRED
DE3 patents
Patents
3 patentsUS6056826AMay 2, 2000
Vacuum coating device for coating substrates on all sides
LEYBOLD SYSTEMS GMBH25 citations89
US6187160B1Feb 13, 2001
Apparatus for the coating of substrates in a vacuum chamber
LEYBOLD SYSTEMS GMBH18 citations81
US6206975B1Mar 27, 2001
Vacuum treatment system for application of thin, hard layers
LEYBOLD SYSTEMS GMBH7 citations70