Inventor
CRENSHAW DARIUS
US5 patents
Patents
5 patentsUS6184074B1Feb 6, 2001
Method of fabrication a self-aligned polysilicon/diffusion barrier/oxygen stable sidewall bottom electrode structure for high-K DRAMS
TEXAS INSTRUMENTS INC44 citations91
US6171898B1Jan 9, 2001
Method of fabricating an oxygen-stable layer/diffusion barrier/poly bottom electrode structure for high-K-DRAMS using a disposable-oxide processing
TEXAS INSTRUMENTS INC22 citations91
US5998225ADec 7, 1999
Method of fabricating an oxygen-stable layer/diffusion barrier/poly bottom electrode structure for high-K DRAMs using disposable-oxide processing
TEXAS INSTRUMENTS INC21 citations91
US6525396B2Feb 25, 2003
Selection of materials and dimensions for a micro-electromechanical switch for use in the RF regime
TEXAS INSTRUMENTS INC7 citations72
US6180446B1Jan 30, 2001
Method of fabricating an oxygen-stable layer/diffusion barrier/poly bottom electrode structure for high-K DRAMS using disposable-oxide processing
TEXAS INSTRUMENTS INC10 citations72