Inventor
BAILEY GEORGE E
US10 patents
⚠️ This page may combine multiple inventors who share the name “BAILEY GEORGE E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
8 patentsUS6894762B1May 17, 2005
Dual source lithography for direct write application
LSI LOGIC CORP24 citations92
US6885436B1Apr 26, 2005
Optical error minimization in a semiconductor manufacturing apparatus
LSI LOGIC CORP17 citations92
US7023530B1Apr 4, 2006
Dual source lithography for direct write application
LSI LOGIC CORP5 citations73
US6627466B1Sep 30, 2003
Method and apparatus for detecting backside contamination during fabrication of a semiconductor wafer
LSI LOGIC CORP6 citations72
US7098996B1Aug 29, 2006
Optical error minimization in a semiconductor manufacturing apparatus
LSI LOGIC CORP2 citations62
US7005217B2Feb 28, 2006
Chromeless phase shift mask
LSI LOGIC CORP6 citations60
US6943055B2Sep 13, 2005
Method and apparatus for detecting backside contamination during fabrication of a semiconductor wafer
LSI LOGIC CORP0 citations51
US6764749B2Jul 20, 2004
Method to improve the resolution of a photolithography system by use of a coupling layer between the photo resist and the ARC
LSI LOGIC CORP0 citations51