Inventor

OWADA NOBUO

JP47 patents

⚠️ This page may combine multiple inventors who share the name “OWADA NOBUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OWADA NOBUO

HITACHI LTD

Semiconductor integrated circuit device and fabrication process thereof

Semiconductor integrated circuit device with vertically stacked conductor interconnections

Method for manufacturing a semiconductor device

Process for manufacturing semiconductor integrated circuit device

Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same

Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same

Semiconductor apparatus and semiconductor package

Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same

Semiconductor integrated circuit device and method of manufacturing the same

Semiconductor integrated circuit device in which a semiconductor chip is mounted with solder bumps for mounting to a wiring substrate

Semiconductor integrated circuit device in which a semiconductor chip is mounted with solder bumps for mounting to a wiring substrate

Fabrication process for a semiconductor integrated circuit device

Semiconductor integrated circuit device and fabrication process thereof

Semiconductor device and method for manufacturing the same

Process for manufacturing semiconductor integrated circuit device

Fabrication process of semiconductor integrated circuit device

Method of fabricating a semiconductor device having silicide layers for electrodes

Semiconductor integrated circuit device and manufacturing method thereof

Semiconductor integrated circuit device and fabrication process thereof

Semiconductor integrated circuit device having a first wiring strip exposed through a connecting hole, a transition-metal film in the connecting hole and an aluminum wiring strip thereover, and a transition-metal nitride film between the aluminum wiring strip and the transition-metal film

Process for manufacturing semiconductor integrated circuit device

Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same

Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same

Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same

Method of forming teos oxide and silicon nitride passivation layer on aluminum wiring

Semiconductor integrated circuit device process for fabricating the same and apparatus for fabricating the same

Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same

Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device

Method of manufacturing semiconductor IC using selective poly and EPI silicon growth

Method of manufacturing semiconductor integrated circuit bipolar transistor device

Method of manufacturing semiconductor integrated circuit bipolar transistor device

Semiconductor device with multilayer base contact

RENESAS TECH CORP

Process for manufacturing semiconductor integrated circuit device

Semiconductor integrated circuit device and fabrication process thereof

Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device

Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device

Process for manufacturing semiconductor integrated circuit device

Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device

Process for manufacturing semiconductor integrated circuit device

Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device

Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device

Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device

KAMATA TADASHI

Semiconductor integrated circuit device, method for producing the same, and ion implanter for use in the method

HITACHI VLSI ENG

Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same

HITACHI INT ELECTRIC INC

Manufacturing method of semiconductor device

MAEDA TAKAHIRO

Method for manufacturing semiconductor device, and substrate processing apparatus

OHASHI NAOFUMI

Process for manufacturing semiconductor integrated circuit device