Inventor
LEE SHING M
US8 patents
⚠️ This page may combine multiple inventors who share the name “LEE SHING M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
6 patentsUS6707540B1Mar 16, 2004
In-situ metalization monitoring using eddy current and optical measurements
KLA TENCOR CORP162 citations98
US6433541B1Aug 13, 2002
In-situ metalization monitoring using eddy current measurements during the process for removing the film
KLA TENCOR CORP161 citations97
US6787773B1Sep 7, 2004
Film thickness measurement using electron-beam induced x-ray microanalysis
KLA TENCOR CORP69 citations95
US6621264B1Sep 16, 2003
In-situ metalization monitoring using eddy current measurements during the process for removing the film
KLA TENCOR CORP72 citations95
US7070476B2Jul 4, 2006
In-situ metalization monitoring using eddy current measurements during the process for removing the film
KLA TENCOR CORP17 citations91
US6885190B2Apr 26, 2005
In-situ metalization monitoring using eddy current measurements during the process for removing the film
KLA TENCOR CORP11 citations72