Inventor
JOHNSON III WALTER HALMER
US5 patents
Patents
5 patentsUS6707540B1Mar 16, 2004
In-situ metalization monitoring using eddy current and optical measurements
KLA TENCOR CORP162 citations98
US6433541B1Aug 13, 2002
In-situ metalization monitoring using eddy current measurements during the process for removing the film
KLA TENCOR CORP161 citations97
US6621264B1Sep 16, 2003
In-situ metalization monitoring using eddy current measurements during the process for removing the film
KLA TENCOR CORP72 citations95
US7070476B2Jul 4, 2006
In-situ metalization monitoring using eddy current measurements during the process for removing the film
KLA TENCOR CORP17 citations91
US6885190B2Apr 26, 2005
In-situ metalization monitoring using eddy current measurements during the process for removing the film
KLA TENCOR CORP11 citations72