Inventor
HEENAN CAROL J
US5 patents
Patents
5 patentsUS6746933B1Jun 8, 2004
Pitcher-shaped active area for field effect transistor and method of forming same
IBM35 citations92
US6960514B2Nov 1, 2005
Pitcher-shaped active area for field effect transistor and method of forming same
IBM9 citations73
US6887797B2May 3, 2005
Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer
IBM4 citations72
US6436196B1Aug 20, 2002
Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer
IBM4 citations61
US6346487B1Feb 12, 2002
Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer
IBM4 citations61