Inventor
HODGE WADE J
US7 patents
⚠️ This page may combine multiple inventors who share the name “HODGE WADE J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
5 patentsUS6887797B2May 3, 2005
Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer
IBM4 citations72
US6436196B1Aug 20, 2002
Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer
IBM4 citations61
US6346487B1Feb 12, 2002
Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer
IBM4 citations61
US7413967B2Aug 19, 2008
Yield improvement in silicon-germanium epitaxial growth
IBM2 citations58
US7118995B2Oct 10, 2006
Yield improvement in silicon-germanium epitaxial growth
IBM2 citations58