Inventor

HONG DUK-HO

KR5 patents

⚠️ This page may combine multiple inventors who share the name “HONG DUK-HO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

4 patents

US6976902B2Dec 20, 2005

Chemical mechanical polishing apparatus

SAMSUNG ELECTRONICS CO LTD12 citations83

US7166019B2Jan 23, 2007

Flexible membrane for a polishing head and chemical mechanical polishing (CMP) apparatus having the same

SAMSUNG ELECTRONICS CO LTD14 citations82

US7435673B2Oct 14, 2008

Methods of forming integrated circuit devices having metal interconnect structures therein

SAMSUNG ELECTRONICS CO LTD4 citations62

US6924234B2Aug 2, 2005

Method and apparatus for polishing a copper layer and method for forming a wiring structure using copper

SAMSUNG ELECTRONICS CO LTD6 citations61

INFINEON TECHNOLOGIES AG

1 patent

US7282451B2Oct 16, 2007

Methods of forming integrated circuit devices having metal interconnect layers therein

INFINEON TECHNOLOGIES AG1 citations51