Inventor

KIRK MICHAEL L

US3 patents

⚠️ This page may combine multiple inventors who share the name “KIRK MICHAEL L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MKS INSTR INC

2 patents

US9336995B2May 10, 2016

Multiple radio frequency power supply control of frequency and phase

MKS INSTR INC20 citations90

US6983215B2Jan 3, 2006

RF metrology characterization for field installation and serviceability for the plasma processing industry

MKS INSTR INC37 citations86

ENI TECHNOLOGY INC

1 patent

US6707255B2Mar 16, 2004

Multirate processing for metrology of plasma RF source

ENI TECHNOLOGY INC64 citations94