Inventor
FRAUENKNECHT AXEL
DE4 patents
Patents
4 patentsUS6639192B2Oct 28, 2003
Deposition device for depositing semiconductor material on a heated substrate
WACKER CHEMIE GMBH36 citations90
US7013620B2Mar 21, 2006
Process and apparatus for the cost-effective packaging of polysilicon fragments
WACKER CHEMIE GMBH20 citations88
US6946030B2Sep 20, 2005
Method for the production of a silica glass crucible with crystalline regions from a porous silica glass green body
WACKER CHEMIE GMBH12 citations81
US6444028B2Sep 3, 2002
Charging material and holding system for the charging material
WACKER CHEMIE GMBH10 citations67