Inventor
FRITZE MICHAEL
US6 patents
Patents
6 patentsUS6818389B2Nov 16, 2004
Method of design and fabrication of integrated circuits using regular arrays and gratings
MASSACHUSETTS INST TECHNOLOGY145 citations97
US6934007B2Aug 23, 2005
Method for photolithography using multiple illuminations and a single fine feature mask
MASSACHUSETTS INST TECHNOLOGY26 citations91
US6884551B2Apr 26, 2005
Method and system of lithography using masks having gray-tone features
MASSACHUSETTS INST TECHNOLOGY40 citations91
US7651821B2Jan 26, 2010
Method and system of lithography using masks having gray-tone features
MASSACHUSETTS INST TECHNOLOGY10 citations82
US7583360B2Sep 1, 2009
Method for photolithography using multiple illuminations and a single fine feature mask
MASSACHUSETTS INST TECHNOLOGY4 citations61
US7306881B2Dec 11, 2007
Method and system of lithography using masks having gray-tone features
MASSACHUSETTS INST TECHNOLOGY4 citations61