Inventor

BECKNELL ALAN F

US4 patents

⚠️ This page may combine multiple inventors who share the name “BECKNELL ALAN F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AXCELIS TECH INC

2 patents

US7381651B2Jun 3, 2008

Processes for monitoring the levels of oxygen and/or nitrogen species in a substantially oxygen and nitrogen-free plasma ashing process

AXCELIS TECH INC10 citations79

US7449416B2Nov 11, 2008

Apparatus and plasma ashing process for increasing photoresist removal rate

AXCELIS TECH INC12 citations77

GRACE W R & CO

2 patents

US5508141AApr 16, 1996

Autodeposition emulsion and methods of using thereof to selectively protect metallic surfaces

GRACE W R & CO18 citations70

US5232815AAug 3, 1993

Autodeposition emulsion and methods of using thereof to selectively protect metallic surfaces

GRACE W R & CO18 citations70