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Inventor
TAKAHAGI TAKAYUKI
JP
6 patents
⚠️ This page may combine multiple inventors who share the name “TAKAHAGI TAKAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMICONDUCTOR TECH ACAD RES CT
2 patents
US7022598B2
Apr 4, 2006
Method of producing multilayer interconnection structure
SEMICONDUCTOR TECH ACAD RES CT
8 citations
69
US6852624B2
Feb 8, 2005
Electroless plating process, and embedded wire and forming process thereof
SEMICONDUCTOR TECH ACAD RES CT
4 citations
57
RESEARCH DEV CORP
1 patent
US5007372A
Apr 16, 1991
Vacuum depositing apparatus
RESEARCH DEV CORP
19 citations
74
RORZE CORP
1 patent
US7749920B2
Jul 6, 2010
Low dielectric constant films and manufacturing method thereof, as well as electronic parts using the same
RORZE CORP
5 citations
68
ELPIDA MEMORY INC
1 patent
US7371694B2
May 13, 2008
Semiconductor device fabrication method and fabrication apparatus
ELPIDA MEMORY INC
0 citations
48
SAKURAI TOSHIO
1 patent
US8158536B2
Apr 17, 2012
Low dielectric constant films and manufacturing method thereof, as well as electronic parts using the same
SAKURAI TOSHIO
0 citations
45