Inventor
CHAN LANA HIULUI
US12 patents
⚠️ This page may combine multiple inventors who share the name “CHAN LANA HIULUI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
7 patentsUS8048805B2Nov 1, 2011
Methods for growing low-resistivity tungsten film
NOVELLUS SYSTEMS INC47 citations98
US7772114B2Aug 10, 2010
Method for improving uniformity and adhesion of low resistivity tungsten film
NOVELLUS SYSTEMS INC89 citations98
US7589017B2Sep 15, 2009
Methods for growing low-resistivity tungsten film
NOVELLUS SYSTEMS INC103 citations98
US7141494B2Nov 28, 2006
Method for reducing tungsten film roughness and improving step coverage
NOVELLUS SYSTEMS INC147 citations98
US7955972B2Jun 7, 2011
Methods for growing low-resistivity tungsten for high aspect ratio and small features
NOVELLUS SYSTEMS INC87 citations97
US7655567B1Feb 2, 2010
Methods for improving uniformity and resistivity of thin tungsten films
NOVELLUS SYSTEMS INC91 citations97
US7262125B2Aug 28, 2007
Method of forming low-resistivity tungsten interconnects
NOVELLUS SYSTEMS INC91 citations97
CHAN LANA HIULUI
2 patentsCHANDRASHEKAR ANAND
2 patentsUS8058170B2Nov 15, 2011
Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics
CHANDRASHEKAR ANAND83 citations95
US8409987B2Apr 2, 2013
Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics
CHANDRASHEKAR ANAND34 citations91