Inventor
GODFRIED HERMAN PHILIP
NL27 patents
⚠️ This page may combine multiple inventors who share the name “GODFRIED HERMAN PHILIP”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS10627724B2Apr 21, 2020
Lithographic apparatus and method
ASML NETHERLANDS BV2 citations69
US9645510B2May 9, 2017
Method of controlling a radiation source and lithographic apparatus comprising the radiation source
ASML NETHERLANDS BV3 citations68
US10146133B2Dec 4, 2018
Lithographic apparatus and method
ASML NETHERLANDS BV2 citations66
US11774867B2Oct 3, 2023
Radiation measurement system
ASML NETHERLANDS BV0 citations61
US10082424B2Sep 25, 2018
Diamond-based monitoring apparatus for lithographic apparatus, and a lithographic apparatus comprising diamond-based monitoring apparatus
ASML NETHERLANDS BV1 citations52
US11569628B2Jan 31, 2023
Pulse stretcher and method
ASML NETHERLANDS BV0 citations51
US11287743B2Mar 29, 2022
Control system and method
ASML NETHERLANDS BV0 citations51
US10146134B2Dec 4, 2018
Illumination system
ASML NETHERLANDS BV1 citations48
US9933709B2Apr 3, 2018
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations36
Cymer LLC
7 patentsUS9599510B2Mar 21, 2017
Estimation of spectral feature of pulsed light beam
Cymer LLC6 citations72
US11054665B2Jul 6, 2021
Reducing speckle in an excimer light source
Cymer LLC3 citations71
US10451890B2Oct 22, 2019
Reducing speckle in an excimer light source
Cymer LLC3 citations71
US9762023B2Sep 12, 2017
Online calibration for repetition rate dependent performance variables
Cymer LLC3 citations71
US11686951B2Jun 27, 2023
Reducing speckle in an excimer light source
Cymer LLC0 citations61
US11050213B2Jun 29, 2021
Online calibration for repetition rate dependent performance variables
Cymer LLC0 citations60
US10727642B2Jul 28, 2020
Online calibration for repetition rate dependent performance variables
Cymer LLC0 citations50