Inventor
MASHIMO KAORI
JP3 patents
⚠️ This page may combine multiple inventors who share the name “MASHIMO KAORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHIBAGAKI MASAMI
2 patentsUS9431281B2Aug 30, 2016
Temperature control method for substrate heat treatment apparatus, semiconductor device manufacturing method, temperature control program for substrate heat treatment apparatus, and recording medium
SHIBAGAKI MASAMI1 citations47
US8691676B2Apr 8, 2014
Substrate heat treating apparatus, temperature control method of substrate heat treating apparatus, manufacturing method of semiconductor device, temperature control program of substrate heat treating apparatus, and recording medium
SHIBAGAKI MASAMI1 citations47