Inventor
SLEVIN DAMIEN
US14 patents
⚠️ This page may combine multiple inventors who share the name “SLEVIN DAMIEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
11 patentsUS8940646B1Jan 27, 2015
Sequential precursor dosing in an ALD multi-station/batch reactor
LAM RES CORP540 citations98
US11469084B2Oct 11, 2022
High temperature RF connection with integral thermal choke
LAM RES CORP6 citations83
US10358722B2Jul 23, 2019
Showerhead assembly
LAM RES CORP15 citations81
US9236244B2Jan 12, 2016
Sequential precursor dosing in an ALD multi-station/batch reactor
LAM RES CORP5 citations73
US10190216B1Jan 29, 2019
Showerhead tilt mechanism
LAM RES CORP5 citations68
USD956705SJul 5, 2022
Cooling plate for a semiconductor processing apparatus
LAM RES CORP3 citations67
US12243725B2Mar 4, 2025
High temperature RF connection with integral thermal choke
LAM RES CORP1 citations61
US10774588B2Sep 15, 2020
Cluster tool system with step ladder assembly
LAM RES CORP0 citations49
US10378279B2Aug 13, 2019
Step ladder with component rack system for fabrication facility
LAM RES CORP0 citations49
US10760160B2Sep 1, 2020
Showerhead tilt mechanism
LAM RES CORP0 citations48
US9637821B2May 2, 2017
Method for supplying vaporized precursor
LAM RES CORP0 citations48