Inventor
REDDY SIRISH
US12 patents
⚠️ This page may combine multiple inventors who share the name “REDDY SIRISH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS9362133B2Jun 7, 2016
Method for forming a mask by etching conformal film on patterned ashable hardmask
LAM RES CORP19 citations92
US9337068B2May 10, 2016
Oxygen-containing ceramic hard masks and associated wet-cleans
LAM RES CORP13 citations82
US9928994B2Mar 27, 2018
Methods for decreasing carbon-hydrogen content of amorphous carbon hardmask films
LAM RES CORP3 citations71
US9520295B2Dec 13, 2016
Metal doping of amorphous carbon and silicon films used as hardmasks in substrate processing systems
LAM RES CORP6 citations70
US10242848B2Mar 26, 2019
Carrier ring structure and chamber systems including the same
LAM RES CORP5 citations66
US9875890B2Jan 23, 2018
Deposition of metal dielectric film for hardmasks
LAM RES CORP0 citations51
US9637821B2May 2, 2017
Method for supplying vaporized precursor
LAM RES CORP0 citations48
NOVELLUS SYSTEMS INC
3 patentsUS9023731B2May 5, 2015
Carbon deposition-etch-ash gap fill process
NOVELLUS SYSTEMS INC36 citations93
US7906817B1Mar 15, 2011
High compressive stress carbon liners for MOS devices
NOVELLUS SYSTEMS INC40 citations92
US8362571B1Jan 29, 2013
High compressive stress carbon liners for MOS devices
NOVELLUS SYSTEMS INC5 citations84