Inventor

SIMS JAMES

US2 patents

⚠️ This page may combine multiple inventors who share the name “SIMS JAMES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SLEVIN DAMIEN

1 patent

US8628618B2Jan 14, 2014

Precursor vapor generation and delivery system with filters and filter monitoring system

SLEVIN DAMIEN4 citations64

LAM RES CORP

1 patent

US9637821B2May 2, 2017

Method for supplying vaporized precursor

LAM RES CORP0 citations48