Inventor
SABRI MOHAMED
US29 patents
⚠️ This page may combine multiple inventors who share the name “SABRI MOHAMED”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
8 patentsUS9460915B2Oct 4, 2016
Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges
LAM RES CORP3 citations71
US12308216B2May 20, 2025
Mechanical suppression of parasitic plasma in substrate processing chamber
LAM RES CORP0 citations62
US11862435B2Jan 2, 2024
Mechanical suppression of parasitic plasma in substrate processing chamber
LAM RES CORP0 citations62
US11621150B2Apr 4, 2023
Mechanical suppression of parasitic plasma in substrate processing chamber
LAM RES CORP0 citations62
US10173193B2Jan 8, 2019
Ammonia radical generator
LAM RES CORP0 citations52
US9852901B2Dec 26, 2017
Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges
LAM RES CORP0 citations51
US9637821B2May 2, 2017
Method for supplying vaporized precursor
LAM RES CORP0 citations48
US9970108B2May 15, 2018
Systems and methods for vapor delivery in a substrate processing system
LAM RES CORP0 citations37
MICROCONNECT INC
4 patentsUS5621333AApr 15, 1997
Contact device for making connection to an electronic circuit device
MICROCONNECT INC152 citations97
US6091256AJul 18, 2000
Contact device for making connection to an electronic circuit device
MICROCONNECT INC85 citations95
US6046599AApr 4, 2000
Method and device for making connection
MICROCONNECT INC98 citations95
US6496026B1Dec 17, 2002
Method of manufacturing and testing an electronic device using a contact device having fingers and a mechanical ground
MICROCONNECT INC53 citations90
NOVELLUS SYSTEMS INC
3 patentsUS9449795B2Sep 20, 2016
Ceramic showerhead with embedded RF electrode for capacitively coupled plasma reactor
NOVELLUS SYSTEMS INC398 citations98
US10400333B2Sep 3, 2019
Hybrid ceramic showerhead
NOVELLUS SYSTEMS INC7 citations84
US9873946B2Jan 23, 2018
Multi-station sequential curing of dielectric films
NOVELLUS SYSTEMS INC3 citations72