Inventor

SANGPLUG SAANGRUT

US3 patents

⚠️ This page may combine multiple inventors who share the name “SANGPLUG SAANGRUT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US9637821B2May 2, 2017

Method for supplying vaporized precursor

LAM RES CORP0 citations48

US12577666B2Mar 17, 2026

Precursor dispensing systems with line charge volume containers for atomic layer deposition

LAM RES CORP0 citations45

SLEVIN DAMIEN

1 patent

US8628618B2Jan 14, 2014

Precursor vapor generation and delivery system with filters and filter monitoring system

SLEVIN DAMIEN4 citations64