Inventor
OHISHI YUZO
JP9 patents
Patents
9 patentsUS10795265B2Oct 6, 2020
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD2 citations72
US11443964B2Sep 13, 2022
Substrate processing apparatus and substrate processing system
TOKYO ELECTRON LTD0 citations61
US9514951B2Dec 6, 2016
Substrate processing method, substrate processing apparatus, substrate processing system and recording medium
TOKYO ELECTRON LTD2 citations61
US11469115B2Oct 11, 2022
Substrate processing apparatus, substrate processing method and recording medium
TOKYO ELECTRON LTD0 citations57
US11049739B2Jun 29, 2021
Ashing apparatus, ashing method and recording medium
TOKYO ELECTRON LTD0 citations57
US10867817B2Dec 15, 2020
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD0 citations48
US10615062B2Apr 7, 2020
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD0 citations48
US10867813B2Dec 15, 2020
Substrate processing apparatus, substrate processing method and recording medium
TOKYO ELECTRON LTD0 citations47
US10591823B2Mar 17, 2020
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations40