Inventor
HOLEYANNAVAR DEVENDRA CHANNAPPA
IN12 patents
Patents
12 patentsUS10388547B2Aug 20, 2019
Side storage pods, equipment front end modules, and methods for processing substrates
APPLIED MATERIALS INC14 citations92
US10847390B2Nov 24, 2020
Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
APPLIED MATERIALS INC6 citations82
US11353381B1Jun 7, 2022
Portable disc to measure chemical gas contaminants within semiconductor equipment and clean room
APPLIED MATERIALS INC3 citations70
US11284018B1Mar 22, 2022
Smart camera substrate
APPLIED MATERIALS INC2 citations69
US12142500B2Nov 12, 2024
Side storage pods, equipment front end modules, and methods for processing substrates
APPLIED MATERIALS INC0 citations61
US11621182B2Apr 4, 2023
Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
APPLIED MATERIALS INC0 citations61
US12432461B2Sep 30, 2025
Smart camera substrate
APPLIED MATERIALS INC0 citations59
US12142508B2Nov 12, 2024
Factory interface robots usable with integrated load locks
APPLIED MATERIALS INC0 citations59
US12114083B2Oct 8, 2024
Smart camera substrate
APPLIED MATERIALS INC0 citations59
US11736818B2Aug 22, 2023
Smart camera substrate
APPLIED MATERIALS INC0 citations59
US11647577B2May 9, 2023
Ionized gas vent to reduce on wafer static charge and particles
APPLIED MATERIALS INC1 citations54
US12159802B2Dec 3, 2024
Shortened load port for factory interface
APPLIED MATERIALS INC0 citations47