Inventor
BRODINE JEFFREY A
US16 patents
⚠️ This page may combine multiple inventors who share the name “BRODINE JEFFREY A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS10388547B2Aug 20, 2019
Side storage pods, equipment front end modules, and methods for processing substrates
APPLIED MATERIALS INC14 citations92
US9325228B2Apr 26, 2016
Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing
APPLIED MATERIALS INC16 citations92
US8016542B2Sep 13, 2011
Methods and apparatus for extending the reach of a dual scara robot linkage
APPLIED MATERIALS INC40 citations92
US6413037B1Jul 2, 2002
Flexibly mounted contact cup
APPLIED MATERIALS INC20 citations92
US6034863AMar 7, 2000
Apparatus for retaining a workpiece in a process chamber within a semiconductor wafer processing system
APPLIED MATERIALS INC42 citations89
US9033644B2May 19, 2015
Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems with web extending from hub
APPLIED MATERIALS INC9 citations84
US10847390B2Nov 24, 2020
Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
APPLIED MATERIALS INC6 citations82
US7927062B2Apr 19, 2011
Methods and apparatus for transferring substrates during electronic device manufacturing
APPLIED MATERIALS INC17 citations82
US12142500B2Nov 12, 2024
Side storage pods, equipment front end modules, and methods for processing substrates
APPLIED MATERIALS INC0 citations61
US11621182B2Apr 4, 2023
Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
APPLIED MATERIALS INC0 citations61
US11637004B2Apr 25, 2023
Alignment module with a cleaning chamber
APPLIED MATERIALS INC0 citations50
US11538706B2Dec 27, 2022
System and method for aligning a mask with a substrate
APPLIED MATERIALS INC0 citations50