P

Inventor

TAKEUCHI SEIJI

US82 patents
⚠️ This page may combine multiple inventors who share the name “TAKEUCHI SEIJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

24 patents
US5610715AMar 11, 1997

Displacement detecting system, an expose apparatus, and a device manufacturing method employing a scale whose displacement is detected by a selected detection head

CANON KK397 citations99
US5486919AJan 23, 1996

Inspection method and apparatus for inspecting a particle, if any, on a substrate having a pattern

CANON KK155 citations99
US5767962AJun 16, 1998

Inspection system and device manufacturing method using the same

CANON KK102 citations98
US6594012B2Jul 15, 2003

Exposure apparatus

CANON KK32 citations93
US6295118B1Sep 25, 2001

Optical arrangement for exposure apparatus

CANON KK23 citations93
US5861952AJan 19, 1999

Optical inspection method and apparatus including intensity modulation of a light beam and detection of light scattered at an inspection position

CANON KK37 citations93
US5777744AJul 7, 1998

Exposure state detecting system and exposure apparatus using the same

CANON KK46 citations93
US5750294AMay 12, 1998

Best focus determining method

CANON KK30 citations93
US5585918ADec 17, 1996

Foreign particle inspecting system

CANON KK39 citations93
US5541729AJul 30, 1996

Measuring apparatus utilizing diffraction of reflected and transmitted light

CANON KK21 citations93
US5461474AOct 24, 1995

Inspection apparatus for detecting foreign matter on a surface to be inspected, and an exposure apparatus and a device manufacturing method using the same

CANON KK49 citations93
US5321502AJun 14, 1994

Measuring method and measuring apparatus

CANON KK25 citations93
US7508493B2Mar 24, 2009

Exposure apparatus and device manufacturing method

CANON KK30 citations92
US7095497B2Aug 22, 2006

Beam splitting apparatus, transmittance measurement apparatus, and exposure apparatus

CANON KK16 citations92
US5652657AJul 29, 1997

Inspection system for original with pellicle

CANON KK44 citations92
US7675629B2Mar 9, 2010

Exposure apparatus and device manufacturing method using a common path interferometer to form an interference pattern and a processor to calculate optical characteristics of projection optics using the interference pattern

CANON KK14 citations84
US7251029B2Jul 31, 2007

Birefringence measurement apparatus, strain remover, polarimeter and exposure apparatus

CANON KK12 citations83
US7015456B2Mar 21, 2006

Exposure apparatus that acquires information regarding a polarization state of light from a light source

CANON KK11 citations83
US7573563B2Aug 11, 2009

Exposure apparatus and device manufacturing method

CANON KK7 citations74
US7030998B2Apr 18, 2006

Phase measurement apparatus for measuring characterization of optical thin films

CANON KK8 citations74
US5742386AApr 21, 1998

Apparatus for detecting foreign matter on a substrate, and an exposure apparatus including the same

CANON KK14 citations74
US5404220AApr 4, 1995

Measuring method and measuring apparatus for determining the relative displacement of a diffraction grating with respect to a plurality of beams

CANON KK11 citations74
US7286226B2Oct 23, 2007

Method and apparatus for measuring birefringence

CANON KK8 citations73
US6967796B2Nov 22, 2005

Optical element and optical system

CANON KK8 citations73

HITACHI LTD

12 patents
US6638662B2Oct 28, 2003

Lithium secondary battery having oxide particles embedded in particles of carbonaceous material as a negative electrode-active material

HITACHI LTD101 citations97
US6030726AFeb 29, 2000

Lithium secondary battery having negative electrode of carbon material which bears metals

HITACHI LTD109 citations97
US4178270ADec 11, 1979

Method for supporting hydrous metal oxide on carrier

HITACHI LTD59 citations96
US6524749B1Feb 25, 2003

Lithium secondary battery, and process for producing the same

HITACHI LTD46 citations95
US4810597AMar 7, 1989

Fuel cell comprising a device for detecting the concentration of methanol

HITACHI LTD120 citations95
US4070284AJan 24, 1978

Liquid chromatography and apparatus for the same

HITACHI LTD60 citations95
US4894355AJan 16, 1990

Flexible, water-repellent baked carbon plate, its production, fuel cell electrode, fuel cell electrode plate and its production and fuel cell

HITACHI LTD69 citations94
US6268086B1Jul 31, 2001

Non-aqueous secondary battery and a method of manufacturing graphite powder

HITACHI LTD18 citations92
US6083645AJul 4, 2000

Secondary battery using system and material for negative electrode of secondary battery

HITACHI LTD24 citations92
US4073725AFeb 14, 1978

Method and apparatus for liquid chromatography under elevated pressure

HITACHI LTD42 citations91
US4133753AJan 9, 1979

Method of ion exchange chromatography

HITACHI LTD28 citations82
US6383467B1May 7, 2002

Non-aqueous secondary battery and a method of manufacturing graphite powder

HITACHI LTD10 citations73

FELL DON LTD

3 patents

CANON USA INC

3 patents

SEMICONDUCTOR COMPONENTS IND LLC

3 patents

SHIN KOBE ELECTRIC MACHINERY

1 patent

ASAHI KASEI MICRODEVICES CORP

1 patent

SANYO ELECTRIC CO

1 patent

TOSHIBA KK

1 patent

SHARP KK

1 patent

Showing the top 50 of 82 patents by PatentIndex Score.