Inventor
SAPUTRA PUTRA
SG5 patents
Patents
5 patentsUSRE49142EJul 19, 2022
Lithographic apparatus and an object positioning system
ASML NETHERLANDS BV0 citations59
US12578655B2Mar 17, 2026
Sub-field control of a lithographic process and associated apparatus
ASML NETHERLANDS BV0 citations55
US11662666B2May 30, 2023
Sub-field control of a lithographic process and associated apparatus
ASML NETHERLANDS BV0 citations55
US9939738B2Apr 10, 2018
Lithographic apparatus and an object positioning system
ASML NETHERLANDS BV0 citations48
US12578653B2Mar 17, 2026
Method for determining a sampling scheme, a semiconductor substrate measurement apparatus, a lithographic apparatus
ASML NETHERLANDS BV0 citations45