Inventor
SMORENBERG PIETER GERARDUS JACOBUS
NL6 patents
Patents
6 patentsUS11768441B2Sep 26, 2023
Method for controlling a manufacturing process and associated apparatuses
ASML NETHERLANDS BV4 citations70
US11448973B2Sep 20, 2022
Computational metrology based correction and control
ASML NETHERLANDS BV2 citations68
US11669017B2Jun 6, 2023
Method for controlling a manufacturing apparatus and associated apparatuses
ASML NETHERLANDS BV1 citations57
US12578655B2Mar 17, 2026
Sub-field control of a lithographic process and associated apparatus
ASML NETHERLANDS BV0 citations55
US11662666B2May 30, 2023
Sub-field control of a lithographic process and associated apparatus
ASML NETHERLANDS BV0 citations55
US12578653B2Mar 17, 2026
Method for determining a sampling scheme, a semiconductor substrate measurement apparatus, a lithographic apparatus
ASML NETHERLANDS BV0 citations45