Inventor
DERWIN PAUL
NL4 patents
Patents
4 patentsUS11022896B2Jun 1, 2021
Mark position determination method
ASML NETHERLANDS BV3 citations68
US12578655B2Mar 17, 2026
Sub-field control of a lithographic process and associated apparatus
ASML NETHERLANDS BV0 citations55
US11662666B2May 30, 2023
Sub-field control of a lithographic process and associated apparatus
ASML NETHERLANDS BV0 citations55
US12578653B2Mar 17, 2026
Method for determining a sampling scheme, a semiconductor substrate measurement apparatus, a lithographic apparatus
ASML NETHERLANDS BV0 citations45