Inventor

YI SONGSE

KR5 patents

⚠️ This page may combine multiple inventors who share the name “YI SONGSE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

3 patents

US11069580B2Jul 20, 2021

Method of manufacturing a semiconductor device including a plurality of channel patterns

SAMSUNG ELECTRONICS CO LTD3 citations64

US11662662B2May 30, 2023

Photo-decomposable compound, photoresist composition including the same, and method of manufacturing integrated circuit device

SAMSUNG ELECTRONICS CO LTD0 citations59

US11681219B2Jun 20, 2023

Resist composition

SAMSUNG ELECTRONICS CO LTD0 citations49

KIM MYEONG KOO

1 patent

US9676892B2Jun 13, 2017

Polymers for hard masks, hard mask compositions including the same, and methods for forming a pattern of a semiconductor device using a hard mask composition

KIM MYEONG KOO7 citations73

SAMSUNG SDI CO LTD

1 patent

US10312074B2Jun 4, 2019

Method of producing layer structure, layer structure, and method of forming patterns

SAMSUNG SDI CO LTD2 citations68