Inventor
AHN YONG-JUN
KR10 patents
Patents
10 patentsUS9543178B2Jan 10, 2017
Semiconductor wafer stocker apparatus and wafer transferring methods using the same
SAMSUNG ELECTRONICS CO LTD19 citations80
US10964570B2Mar 30, 2021
Semiconductor wafer storage system and method of supplying fluid for semiconductor wafer storage
SAMSUNG ELECTRONICS CO LTD2 citations68
US12534343B2Jan 27, 2026
Inter-floor transport system
SAMSUNG ELECTRONICS CO LTD0 citations59
US12283502B2Apr 22, 2025
Substrate transfer device and substrate transfer method
SAMSUNG ELECTRONICS CO LTD0 citations59
US12068185B2Aug 20, 2024
Interlayer transfer apparatus and article transfer system including the same
SAMSUNG ELECTRONICS CO LTD0 citations56
US11733077B2Aug 22, 2023
Carrier for measurement and wafer transfer system including the same
SAMSUNG ELECTRONICS CO LTD0 citations53
US12459756B2Nov 4, 2025
Substrate transfer device and substrate transfer method
SAMSUNG ELECTRONICS CO LTD0 citations51
US12387759B2Aug 12, 2025
Cassette storage case and cassette management system including the same
SAMSUNG ELECTRONICS CO LTD0 citations49
US12365095B2Jul 22, 2025
Loader device and substrate transport system
SAMSUNG ELECTRONICS CO LTD0 citations49
US12570467B2Mar 10, 2026
Ceiling storage system and control method thereof
SAMSUNG ELECTRONICS CO LTD0 citations48